MO/CVD/ALD Source Bottle

Source Bottle Features:

1. All pipe fittings are made of 316L stainless steel, internally polished with 400-grit mechanical polishing and electrochemical polishing, Ra ≤ 0.25 micrometers;

2. Valves include options such as Swagelok bellows seal valves and diaphragm valves from the USA, as well as Fujikin diaphragm valves from Japan;

3. Sealing gaskets are made of pure nickel-plated silver gaskets;

4. Helium mass spectrometry leak detection rate ≤ 1.0*10⁻¹⁰ mbar·L/s;

5. Capable of holding chemicals with purity ≥ 99.9995%;

6. Total residual element content ≤ 50 PPb;

7. Compatible with media such as TMG, TEG, TMIN, DEE, etc.;

8. Options include pneumatic valves or cross-purge treatment between injection terminals, output terminals, and interfaces;

9. Custom non-standard orders are available.